用透射光谱法测光栅参数的数值模拟  

The numerical simulation of measuring grating parameters with the transmission spectrum method

作　　者：张丽娟[1] 傅克祥[1] 李建龙[1] 麻健勇[1] 谢金[1] 

机构地区：[1]四川大学物理科学与技术学院,成都610064

出　　处：《激光杂志》2005年第3期42-44,共3页Laser Journal

摘　　要：本文基于光栅的严格理论,提出结合透射光谱和优化算法来测量光栅参数的新方法,首先,利用傅立叶模式理论和反射透射系数递推算法(RTCM) ,计算出在2 0 0 -90 0nm波段内的理论透射光谱图,通过在上面叠加不同偏差的高斯噪声来模拟光栅的实际测量曲线,接着在模拟曲线上任取若干个点作为实验测量值,最后利用优化算法进行反演搜索,找到待测光栅的结构参数。文中我们选择了三种类型的光栅对该法进行数值上的模拟,其结果是成功的。该法可能会给光栅参数的测量指明一条新的途径。Based on the rigorous grating theory, a new method is proposed, which measures the grating parameters with the transmission spectrum method, and a certain optimization algorithm.Firstly, the transmission spectrum is obtained with the Fourier model method and reflection and transmission coefficient matrix method (RTCM), based on which the Gaussian noises with different standard deviation are added to it to get the simulated measuring value of transmission spectrum; then five points are gotten respectively from the transmission spectrum. With the normal simplex algorithm, by repeatedly computing, the grating parameters are obtained.At the same time three simulated gratings are taken as examples to explain the feasibility and correctness. This new method will bring forward a bright way to determining grating parameters.

关 键 词：傅立叶模式理论 反射透射系数递推算法 透射光谱法 正单纯形法 高斯噪声 光栅参数 

分 类 号：O434.19[机械工程—光学工程]