半导体材料的霍耳测量  

Hall Measurement of Semiconductor Materials

作　　者：罗江财[1] 

机构地区：[1]重庆光电技术研究所

出　　处：《半导体光电》1994年第4期381-384,共4页Semiconductor Optoelectronics

摘　　要：利用霍耳效应研究半导体材料的电阻率，载流子浓度和迁移率是霍耳测量的主要技术之一。文章简单介绍了ＨＬ５５００霍耳测量系统；列举了用该霍耳系统测量的各种半导体材料，特别是高阻和高迁移率材料的结果，并讨论了有关的干扰问题。Using the Hall effect for determine resistivity, carrier concentration and moboility of semiconductor materials is one of the major techniques of Hall measurement. In this paper. HL5500 Hall Measurement system is introduced briefly. The results measured by the Hall system are enumerated on varieties of semiconductor materials,especially the materials with high resistivity and high mobility. The problem of interference is discussed.

关 键 词：霍耳测量 半导体材料 电阻率 载流子浓度 迁移率 

分 类 号：TN304.07[电子电信—物理电子学]