用神经网络算法预测溅射镀膜时的溅射产额  

Prediction of sputtering yields using the algorithm of neural networks

作　　者：王爱囡[1] 胡继刚[1] 

机构地区：[1]合肥工业大学理学院,安徽合肥230009

出　　处：《合肥工业大学学报（自然科学版）》2005年第7期812-815,共4页Journal of Hefei University of Technology：Natural Science

摘　　要：文章运用人工神经网络理论建立预测模型,综合考虑了影响溅射产额的多个参数;用实例讨论了如何利用网络模型来预测不同条件的溅射产额,并对网络模型的适用性进行了检验,证明其有一定的适用价值;其结果可能在生产中应用,也指明了需要进一步研究的问题。The technique of sputtering filming is an important method in the domain of surface modification technologies,but the quality of film has direct relation with sputtering yields. In the paper, the prediction model is built using the theory of artificial neural networks,and the influence of various input parameters on sputtering yields is considered synthetically.To illustrate the theory, the prediction of sputtering yields under different conditions is discussed using the fabricated network model,and the applicability of the network model is verified. The result can be applied to practical production.

关 键 词：溅射产额 神经网络 预测 

分 类 号：TP273.21[自动化与计算机技术—检测技术与自动化装置]