半导体激光器腔面高反射涂层的研究  

The Stady of the lsigh-reflective Coatings on Semiconductor laser Cavity surface

作　　者：杨晓妍[1] 杨莲[1] 王玉霞[1] 

机构地区：[1]长春光机学院近代光学研究所

出　　处：《长春光学精密机械学院学报》1995年第3期67-69,共3页Journal of Changchun Institute of Optics and Fine Mechanics

摘　　要：通过对GaAs－GaAlAs激光器谐振腔后腔面蒸镀ZrO2，MgF2工艺过程，从|理论和实验上分析涂层特性，反射率由无膜时的32％，镀膜后提高到92．5％。保护了器件端面，降低问值电流，提高了激光输出功率和工作寿命。We have studied theoretically and technology process of ZrO2 MgF2, evaporation experimen-tally the coating characteristics viathe plating on the back cavity surfaces of GaAs/GaAlAs laser. Thereflective coefficient have been changed from 32%, in the case without coating, to above 92%. Bythis, the device cavith surfaces have been protected, the output pawer increased, the lifetime extended,and threshold current reduced.

关 键 词：高反射膜 谐振腔 半导体激光器 

分 类 号：TN248.405[电子电信—物理电子学]