溶胶凝胶法制备的Mn系氧化物热敏薄膜的尺寸效应  

Size Effect on the Mn-system Oxide Thin Film Prepared by Sol-Gel Processing

作　　者：宋世庚[1] 康健[1] 李芳孝 王学燕[1] 谭辉[1] 陶明德[1] 

机构地区：[1]中国科学院新疆物理所,新疆医学院基础部

出　　处：《功能材料》1995年第4期309-312,共4页Journal of Functional Materials

摘　　要：本文阐述了用溶胶凝胶法制备ＣｏＭｎＣｕＯ等热敏薄膜的方法，研究了它们的电学性质。结果表明，薄膜的Ｒ－Ｔ特性基本符合Ｒ＝Ｒ＿ｏｅｘｐ（Ｂ／Ｔ）关系。在本文样品厚度的范围内，厚度对电阻率（ρ＿ｆ）和材料常数（Ｂ）有较大的影响。利用扩展电阻仪分析了电阻率随深度的变化，用俄歇电子能谱分析了组分随深度的变化，在此基础上对尺寸效应作出了相应的解释。The Mrrsystem oxide films with spinelstructure; applied to thermistor,were prepared bySOl-Gel processing. It was clear that the size effectwas existed by study on the eleetrical properties. Material constant B increased sharply wlth thedecreasing of the film thickness when the filmthickness was less than a definite value. Theresistivity at 25℃ decreased with the increasing ofthe film thickness. It was indicated by analysis ofAuger electron spectroscopy and spreading resistancethat the size effect on the Mn-system oxide films wasprobably caused by the change of microstructureowing to the effect of interface.

关 键 词：热敏薄膜 尺寸效应 溶胶凝胶法 锰 氧化物半导体 

分 类 号：TN304.205[电子电信—物理电子学] TN379