硅微机械与光纤组合式列阵传感器的研制工艺  

The Developing Technology for Hybrid Silicon Micromachine and Optic Fiber Array Sensor

作　　者：温志渝[1] 钟先信[1] 黄友恕[1] 徐涛[1] 孙晓松[1] 朱维安[1] 

机构地区：[1]国家教委光电技术与系统开放实验室,重庆大学

出　　处：《光电工程》1995年第4期24-29,共6页Opto-Electronic Engineering

基　　金：国家自然科学基金

摘　　要：系统地介绍了一种新颖的硅微机械与光纤组合式列阵传感器的特殊制造工艺。在工艺实验的基础上对硅微悬臂梁列阵形成的光刻技术，各向异性腐蚀的机理与方法，梁膜厚度的精确控制，传感器的一体化等技术进行了较深入的研究，并对实验结果进行了详细地分析。这些工艺与常规的ＩＣ工艺兼容，为这类微传感器和执行器的研制打下了较好的实验基础。A special technology for making new hybrid silicon micromachine and optic fiber array sensor is systematically presented in the paper.On the basis of technological experiments.the photoengraving technology formed by silicon microcantilever array. anisotropic etching principle and method.accurate control of the thickness of cantilever and the integrating technology are deeply investigated,and experimental results are analysed in detail.These technologies are compatible with the common IC technology.These investigations have laid a better experimental base for the development of the micro-sensors and actuators.

关 键 词：光纤传感器 悬臂梁 腐蚀 光刻 各向异性 

分 类 号：TN212.05[电子电信—物理电子学]