紫外脉冲激光对聚氯乙烯（PVC）塑料刻蚀产物的研究  

A Products Research of the PVC Plastic Ablation by UV Pusle Laser

作　　者：方尔梯[1] 曾宪康[1] 黄正宇[1] 张抗战 张谊华[1] 滕玉美[1] 

机构地区：[1]华东理工大学化学物理研究室

出　　处：《华东理工大学学报（自然科学版）》1995年第1期112-116,共5页Journal of East China University of Science and Technology

摘　　要：利用四极质谱和离子能量分析器，测定了紫外激光刻蚀ＰＶＣ塑料产生的分子、原子和离子产物的质量分布和各种离子的平动能分布，研究了激光通量对刻蚀的影响，发现离子的产生需要比中性产物有更高的激光阈值，讨论了紫外激光对ＰＶＣ塑料的刻蚀剥离机理。A quadrupole mass spectrometer and an ionic energy analyser have been usedto examine the mass and translational energy distributions of molecules,atoms and ions produced in UV laser ablation of PVC plastic. By studying the effect of laser fluence on ablationprocess, We find that the fluence threshold to produce ions is higher than that of neutralproducts. The mechanism of UV laser induced ablation of PVC based on our results has beendiscussed.

关 键 词：激光 聚氯乙烯 紫外脉冲激光 刻蚀 

分 类 号：TQ325.3[化学工程—合成树脂塑料工业]