用特征多项式法设计PMP的误差补偿算法  

Design of Error-offset Algorithms in Phase Measuring Profilometry by Characteristic Polynomials

作　　者：周利兵[1] 

机构地区：[1]武汉科技学院电子信息工程系,湖北武汉430073

出　　处：《武汉科技学院学报》2005年第9期22-27,共6页Journal of Wuhan Institute of Science and Technology

摘　　要：提出了相位测量轮廓术(PMP)中相移算法的一种设计方法:特征多项式法。运用特征多项式法设计出了两种能同时抑制相移误差和谐波影响的误差补偿新算法,数值模拟验证了新算法对误差的抑制效果。该设计方法同样适用于相移干涉计量术。A method is proposed that used the characteristic polynomials to design phase-shifting algorithms, Two novel algorithms are proposed to offset the effect of phase-shifting miscalib,ation and harmonics or detector nonlinearity. Computer simulation tests the tolerant capability of novel algorithms for these errors. The design method can also apply in Phase-shifting Interferometry.

关 键 词：相位测量轮廓术 特征多项式 相移算法 误差补偿算法 

分 类 号：TP751.1[自动化与计算机技术—检测技术与自动化装置] TN247[自动化与计算机技术—控制科学与工程]