利用光切方法测量微结构的三维微运动  

Measuring three-dimensional micro-motions of microstructures using optical sectioning

作　　者：郭彤[1] 胡春光[1] 胡晓东[1] 栗大超[1] 金翠云[1] 傅星[1] 胡小唐[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《光学技术》2005年第4期568-571,574,共5页Optical Technique

基　　金：国家863计划资助项目(2004AA404042)

摘　　要：微结构动态特性的测试方法对研发可靠的、能市场化的微机电系统(MEMS)是必需的。开发出了一种测试系统,能使微结构的三维运动可视化。系统包括:利用光学显微镜来实现微结构的放大,并将图像投影到CCD摄像机上;利用光切方法来获取一系列图像,以此来表征微结构的三维运动;利用频闪照明来冻结微结构的高速运动。通过研究微加工水平谐振器在激励条件下的三维运动,论证了系统的功能。Advanced testing methods for the dynamics of microdevices were necessary to develop reliable, marketable microelectromechanical system （MEMS）. A new measuring system was developed for visualizing the 3D motions of microstructures. This system included： a light microscope to magnify the image of the microstructure and to project the image to the CCD camera; optical sectioning to obtain sequences of images that characterize the entire 3D motion; stroboscopic illumination to freeze the fast motions of the microstructure. The capabilities of the system is described by measuring the 3D motions of a stimulated micromachined lateral resonator.

关 键 词：微机电系统 微运动 光切技术 频闪照明 

分 类 号：TH706[机械工程—仪器科学与技术]