阵列式脉象传感器的设计与制作  

Design and manufacture of array sphygmology sensor

作　　者：齐天华[1] 刘继伟[1] 高文秀[2] 

机构地区：[1]厦门大学机电工程系,福建厦门361005 [2]厦门大学纳米科技中心,福建厦门361005

出　　处：《传感器技术》2005年第8期86-88,共3页Journal of Transducer Technology

摘　　要：提出了一种用微机电系统(MEMS)技术应变传感器阵列探头客观细腻地采集人体脉象的新思路。探头采用直接腐蚀出电阻条的技术,具有工艺简单、成本低廉、电阻变化率高、工作可靠等优点。对设计进行了理论计算和优化,并用有限元分析软件ANSYS8.0进行了结构和电耦合场仿真,模拟悬臂梁端点位移对电阻变化的影响。当悬臂梁末端位移变化为50μm时,电阻变化率模拟结果为18.84%,与理论计算值19.67%符合得很好。For acquiring more comprehensive information of pulse conditions,a probe of pulse symbol instrument designed by MEMS technology has been presented,the method of direct etching of silicon is utilized to form the resistor. The process is simple, economical, and it has high change rate of resistor,working reliability. After theory calculation, the coupled-field analyses between the structural and electric fields are carried out by finite element analysis software ANSYS 8.0. It simulates the change of resistor with the displacement of cantilever tip. When the tip of cantilever displaces 50μm, the modulation result is 18.84 % , and is in good agreement with the calculation result of 19.67 %.

关 键 词：脉象 压阻效应 微机电系统 ANSYS仿真 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]