碳化硅晶须制备工艺  

THE TECHNOLOGY FOR MANUFACTURING SIC WHISKERS

作　　者：薛青[1] 李亚东[1] 汤浩[2] 刘伟群 

机构地区：[1]苏州大学分析测试中心 [2]苏州大学物理系

出　　处：《苏州大学学报（自然科学版）》1995年第4期103-106,共4页Journal of Soochow University(Natural Science Edition)

基　　金：系江苏省教委自然教育基金

摘　　要：本文采用稻壳作为硅源,利用二氧化硅还原法,研究批量制备碳化硅晶须的新工艺及影响碳化硅晶须生长的几个重要因素。利用SEM分析手段对自制的碳化硅晶须进行了形貌、结构的观察分析。In this paper,using rice hulls as a Si source,making use of SiO2 reduction,we have studied the new technology of manufacturing SiC whiskers in large scale as well as several important factors of affecting on SiC whisker growth. The morphology and microstructure of SiC whiskers have been analyzed by such modern instruments as SEM.

关 键 词：稻壳 碳化硅 晶须 制备 单晶 

分 类 号：O784[理学—晶体学]