Cl对Si_3N_4粉中α／β相含量的影响  

Effect of Chlorine on the Content of α/β Phase in Si_3N_4 Powders

作　　者：袁亚 来月英[1] 邓宗武[1] 徐功骅[1] 吴华武[1] 张克 

机构地区：[1]清华大学化学系

出　　处：《无机材料学报》1995年第3期307-312,共6页Journal of Inorganic Materials

基　　金：国家自然科学基金

摘　　要：本文研究了用ＳｉＣｌ４氨解法制备Ｓｉ３Ｎ４粉时，要得到高α相的Ｓｉ３Ｎ４粉的关键，在于必须使系统中杂质氯含量足够低．研究结果表明，在高纯Ｎ２气气氛中制粉，由于系统中氯含量较高，促使粉料中β相含量增高，α相含量降低．而在ＮＨ３气气氛中制粉，由于不断流动的ＮＨ３气，在高温下能携带出残留在粉料中的杂质ＮＨ４Ｃｌ，从而使粉料中的氯含量＜０．０１％，这时制得的粉料，其α相的含量均在９７％以上．In this work, we studied the process for preparation of Si3N4 powders by ammonolysis of SiCl4. It was discovered that when the reactions were carried out in an atmosphere of NH3 the content of α-Si3N4 in the obtained powders was over 97%, because NH4Cl impurity remained in the powders could be carried away by flowing NH3 (content of chlorine in the powders: less 0.01%); but if the reactions were carried out in an atmosphere of N2, the coatellt of β-Si3N4 in the products would increase and the content of α-Si3N4would reduce because the content of chlorine was higher in the reaction system. Our results show that the key to prepare high α-Si3N4 powders is to keep enough low content of chlorine impurity in the system.

关 键 词：α/β相 氮化硅 陶瓷 氯 氨解法 

分 类 号：TQ174.758[化学工程—陶瓷工业]