MOD法制备YBa_2Cu_3O_(7-x)超导薄膜  

Preparation of YBa_2Cu_3O(7-x)Superconducting Thin Films by Metalorganic Deposition

作　　者：杨培志[1] 王玉霞[1] 阮耀钟[1] 

机构地区：[1]昆明贵金属研究所,中国科技大学材料科学与工程系

出　　处：《稀有金属材料与工程》1995年第6期58-63,共6页Rare Metal Materials and Engineering

摘　　要：用Ｙ、Ｂａ、Ｃｕ的三氟乙酸盐溶液，通过ＭＯＤ法在ＳｒＴｉＯ３（１００）衬底上成功地制得了黑色的、表面光滑的ＹＢＣＯ超导薄膜。研究了两种理想的成膜烧结工艺，对膜进行了物相研究。结果表明：在８５０℃，潮湿氧气氛中烧结的薄膜具有一定的择优取向；而在７５０℃，潮湿的低氧气氛中烧结的薄膜则具有高度的ｃ轴织构，前者的Ｔｃ（ｏｎｓｅｔ）≈９０Ｋ，Ｔｃｏ≈７９Ｋ，较低的氧分压似乎有利于ｃ轴织构。Superconducting thin films of YBa2Cu3O7-xhave been prepared on SrTiO3(100) substrate by metalorganic deposition (MOD) of trifluoroacetate precursors. Two kinds of ideal calcinc process by which the films can be form are investigated. Physical properties study on'the thin films indicates that the films at 850t in moist oxygen which show Tc(oase,) = 90K and Tco≈79K are preferentially axis oriented to a certain extant, whereas the films fired at 750℃in the moist low Po2 atmosphere have strong c-axis normal texture. The low Po2gas appears to strengthen c-axis normal texture.

关 键 词：超导材料 薄膜 制备 MOD法 物相 

分 类 号：TM260.51[一般工业技术—材料科学与工程]