扩散硅压力传感器的温度特性及其补偿  

Temperature Characteristics of Silicon Pressure Transducers and Temperature Compensations

作　　者：唐伟[1] 庞世信[1] 

机构地区：[1]沈阳仪器仪表工艺研究所,沈阳市110043

出　　处：《仪表技术与传感器》1995年第6期5-8,共4页Instrument Technique and Sensor

摘　　要：本文分析了扩散硅压力传感器灵敏度温漂的各种曲线,同时给出了一种简单的温度补偿方法.这种方法虽然不能得到准确解,但是它的补偿结果非常好.采用这种方法补偿对所用的外围器件要求不需要非常严格,而且适用于窄、宽温范围.本文给出了补偿前后的对照表.By analysis of temperature drift curves of sensitivity of diffused silicon pressure transducers, a simple method for their temperature compensations is presented in this paper. Though accurate solutions are not obtained, the compensation results are satisfactory. Moreover, this method does not place strict requirements on outer circuit devices, but is suitable for both narrow and wide temperature ranges. Tables for contrast before and after the compensations are also presented.

关 键 词：扩散硅 压力传感器 温度补偿 传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]