变形反射镜薄膜应力与元件变形有限元研究  

Finite element analysis on the residual stress of thin film on components of deformable mirror

作　　者：张耀平[1] 许鸿[1] 凌宁[1] 张云洞[1] 

机构地区：[1]中国科学院光电技术研究所

出　　处：《光电工程》2005年第8期28-31,共4页Opto-Electronic Engineering

基　　金：国家863高技术资助项目

摘　　要：残余应力是变形反射镜面临的一个重要问题。考虑薄膜中残余应力的起源,利用有限元软件建立了变形反射镜有限元模型。基于所建立的有限元模型,计算变形镜各部分受薄膜残余应力作用后的变形与应力分布。与试验测量结果进行对比,计算结果表明,建立的模型是合理的,薄膜产生的残余应力为张应力,氟化物薄膜产生的张应力大于ZnS薄膜产生的压应力,残余应力主要集中在变形反射镜镜面上,基本呈放射状分布,外圈驱动器受到应力较大。Residual stress is a major problem of deformable mirror. An FEA （Finite Element Analysis） model for deformable mirror is built and based on the model the residual stresses of thin film on deformable mirror is calculated and analyzed by FEA software in the paper. The calculated result is compared with experimental result. The comparison proves the model right. The distribution of deformation and residual stress of deformable mirror are also analyzed. The results show that the residual stress is tensile stress. The tensile stress of fluoride is lager than the compressive stress of ZnS. The residual stress is mainly radial distributed on the surface of deformable mirror and more stress is on the outer piezoelectric drivers.

关 键 词：变形反射镜 薄膜应力 有限元分析 自适应光学 

分 类 号：O484.1[理学—固体物理]