一种新场发射压力传感器阳极膜结构的模拟与测试  

Simulation and Test of Novel Structure for Anode Film of Field Emission Pressure Sensors

作　　者：钱开友[1] 颜丙勇[1] 林仰魁[1] 王芸[1] 徐东[1] 蔡炳初[1] 

机构地区：[1]薄膜与微细技术教育部重点实验室,微米/纳米加工技术国家级重点实验室,上海交通大学微纳米科学技术研究院,上海200030

出　　处：《传感技术学报》2005年第3期614-616,共3页Chinese Journal of Sensors and Actuators

基　　金：上海市科技发展基金资助(0214nm031)

摘　　要：提出了场发射压力传感器阳极变形膜的双层膜结构。计算机模拟证明这种结构与已报道的单层膜相比具有大量程与高灵敏度的优点。对这种结构的形变特性进行了实验测试,考虑到测量误差与湿法刻蚀造成膜表面的不平整因素,测实结果与模拟结果较为相符。The structure of two layer films for the anode sensing film of the field emission pressure sensors is presented. Computer simulation shows the structure has the merits of wide range of measurement and high sensitivity compared with the reported single layer film. Due to the influence of test＇s error and the roughness of the surface made by the wet etching, the measurement results may be considered to be accordant with the experimental simulation results.

关 键 词：场发射 压力传感器 阳极变形膜 计算机模拟 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TP391.9[自动化与计算机技术—控制科学与工程]