MEMS微传感器件IP库的建立方法  

Method of Establishing MEMS IP Liberty

作　　者：殷刚毅[1] 

机构地区：[1]东南大学微电子中心,南京210096

出　　处：《电子器件》2005年第3期690-692,695,共4页Chinese Journal of Electron Devices

摘　　要：为实现MEMS器件系统级的模拟,运用等效电路宏模型的方法建立相应的IP模型库单元。本文以悬臂梁结构的微传感器为例,描述了如何根据基本结构与数学方程建立等效电路宏模型,并采用COVENTORWARE软件进行了模型的各个模态的谐振频率和相关曲线的验证,最后通过我们自行开发的IP库单元建立接口软件对单元进行了封装与入库。To perform the simulation of MEMS devices at the system level, the macromodel of equivalent circuit are utilized to build the library unit of IP models, This paper, by using the suspended beam, illustrates how to build the macromodel of equivalent circuit according to the basic structure and the mathematical equation. The resonant frequency of each modal and relevant curves were verified with COVENTORWARE. The units were packaged with the IP library interface software.

关 键 词：等效电路宏模型 系统级 SPICE IP库 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TP15[自动化与计算机技术—控制科学与工程]