热氧化温度对磁控溅射CrTiAlN梯度镀层表面形貌与组织结构的影响  

Influence of Oxidation Temperature on Surface Morphology and Microstructure of Magnetron Sputtered CrTiAliN Gradient Coatings

作　　者：白力静[1,2] 蒋百灵[3] 文晓斌[3] 张国君[3] 何家文[1] 

机构地区：[1]西安交通大学材料学院 [2]西安理工大学材料学院,陕西西安710048 [3]西安理工大学材料学院

出　　处：《材料热处理学报》2005年第4期111-114,共4页Transactions of Materials and Heat Treatment

基　　金：西安理工大学校研究基金项目(210103);中青年科技创新计划(210403)

摘　　要：采用SEM和XRD法,分析了磁控溅射CrTiAliN梯度镀层的表面与断口形貌及其相组成随加热温度的变化规律。研究表明:CrTiAliN镀层在600℃之前物相和组织结构保持稳定,随后的升温过程中有相变行为,随着温度的升高,物相由以致密的非晶态物质为主,依次出现CrN、Cr2O3相和AlN等物相;相变的发生有利于镀层保持高温硬度和结合力。加热至900℃时,尽管在镀层表面观察到微区融化现象,但膜基结合紧密;加热至1100℃时镀层表面出现开裂并伴有剥落现象。从温度对镀层的氧化形貌及物相、组织转变机理分析,CrTiAlN梯度镀层在≤900℃时有良好的热稳定性。The effect of heating temperature on morphology, microstructure and phase components of magnetron sputtered CrTiAliN gradient coatings were studied by SEM and XRD. The results show that the coating is stable under 600℃ and phase transformations occure when the temperatures increase, which is beneficial to hardness, adhesions and toughness of the coating. The coating surfaces are locally molten when heating to 900℃, but the adhesive of the coating with steel substrate is still very well. When heated at 1100℃, the coating can pull off from the substrates.It is indicated that the CrTiAliN coatings have good thermal stable below the 900℃.

关 键 词：氧化 磁控溅射 梯度镀层 

分 类 号：TG174.44[金属学及工艺—金属表面处理]