基于硅材料的微型气体涡轮机中微型燃烧器的设计和加工(英文)  

Design and Fabrication of a Silicon-Based Micro Combustor for Micro Gas Turbine Engine

作　　者：单学传 金玉丰[2] 王振峰 前田龙太郎[3] 

机构地区：[1]新加坡精密加工技术研究所 [2]北京大学微电子研究所,北京100871 [3]日本产业技术综合研究所

出　　处：《纳米技术与精密工程》2005年第3期209-215,共7页Nanotechnology and Precision Engineering

摘　　要：由微型燃烧器、微型压缩机和涡轮组成的微型气体涡轮发动机有望成为微机电系统的能源系统,阐述了一种微型燃烧器的设计和加工,设计时力图增加流路的长度,其目的是减少微型燃烧腔的热损失和有效地对燃料和空气进行预热,该微型燃烧器由7片厚度不同的单晶硅片组成,通过ICP DRIE干刻蚀加工而成.组装后的微燃烧器的样件尺寸为21.5 mm×21.5 mm×4.4 mm,已成功地进行了氢气燃烧实验和测试.该微型燃烧器和转子组合后可以应用于微型气体涡轮发动机,与压电元件组合后可用于微型发电机。Micro gas turbine engine, consisting of a micro combustor, a compressor and a radial inflow turbine, is a promising power generator for micro and nano systems. This paper reports on design and fabrication of a silicon-based micro combustor for micro gas turbine engine. The design employs an extended flow path for preventing heat loss of micro combustion chamber and effectively preheating fuel and air. The first prototype of the implemented micro combustor consists of seven silicon wafers and is fabricated using deep reactive ion etching （DRIE） process. The size of the prototype measures 21.5 mm × 21.5 mm ×4.4 mm after being assembled. The developed combustor has been ignited and tested using hydrogen as its fuel. The developed combustor will have the same configuration as a gas turbine engine after adding rotating rotors for compressor as well as turbine.

关 键 词：微型燃烧器 气体涡轮发动机 燃料喷射 干刻蚀 微型压缩机 气体涡轮机 微燃烧器 加工 设计 硅材料 涡轮发动机 微机电系统 微型发电机 

分 类 号：TK405[动力工程及工程热物理—动力机械及工程]