频率分裂在双频激光器和位移传感器中的两种新应用(英文)  

Two Novel Applications of Frequency Splitting Technology in Dual Frequency Laser and Displacement Sensor

作　　者：宗晓斌[1] 张书练[1] 

机构地区：[1]清华大学精密测试技术及仪器国家重点实验室,北京100084

出　　处：《纳米技术与精密工程》2005年第3期227-231,共5页Nanotechnology and Precision Engineering

摘　　要：主要介绍了激光频率分裂技术的两种新应用,包括用两种方法克服强模竞争以获得频差可覆盖1-40 MHz的双频激光器,以及将一个双折射双频激光器本身用作一个位移传感器,这种双频激光器可以填补塞曼激光器和双折射激光器之间存在的3-40 MHz频差空白,可以用作激光干涉仪理想的光源,位移传感器结构简单,其分辨率为79 nm,测量范围达到了15 mm,并且可以自校准。Two novel applications of laser frequency splitting technology are reported, including two methods in solving the problem of mode competition to obtain a dual frequency laser whose frequency difference can cover 1-40 MHz, as well as the principle and the experiments of making a birefringence dual frequency laser itself be a displacement sensor. The dual frequency laser can fill in the gap of 3-40 MHz frequency difference between Zeeman lasers and birefringent lasers, and serve as an ＂ideal＂ source of laser interferometer. The displacement sensor is quite simple in structure. In our experiments, the sensor achieves 79 nm resolution, 15 mm measurement range, and the function of self-alibration.

关 键 词：频率分裂 双频激光器 位移传感器 双折射双频激光器 激光频率分裂 位移传感器 应用 塞曼激光器 传感器结构 激光干涉仪 测量范围 分辨率 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN248[自动化与计算机技术—控制科学与工程]