相对湿度对类金刚石薄膜摩擦磨损性能的影响  

Tribological Property of Diamond-Like Carbon Film at Different Humidity in Air

作　　者：王成兵[1] 李红轩[1] 徐洮[1] 

机构地区：[1]中国科学院兰州化学物理研究所固体润滑国家重点实验室

出　　处：《摩擦学学报》2005年第5期426-430,共5页Tribology

基　　金：国家自然科学基金资助项目(50323007);国家863计划资助项目(2003AA305670)

摘　　要：利用等离子体增强化学气相沉积技术在单晶硅表面制备了含氢类金刚石薄膜,在球-盘摩擦磨损试验机上考察了相对湿度对薄膜摩擦磨损性能的影响,利用扫描电子显微镜和X射线光电子能谱仪观察和分析其磨损表面形貌和化学状态的变化情况.结果表明,随着相对湿度增加,DLC薄膜的摩擦系数和磨损率增加.这主要是由于薄膜表面氧化作用所致.Diamond-like carbon films were successfully deposited on Si substrate by plasma enhanced chemical vapor deposition（PECVD）. Friction and wear behaviors of DLC film sliding against a Si3N4 ball at different humidity（5%,20%,40%,60%,80%,and 100%）were measured using a roating-type ball-on-disk tribometer in air. Friction surfaces of the films and Si3N4 balls wear were investigated by scanning electron microscope（SEM）, and by X-ray photoelectron spectroscopy （XPS）. It was found that surface of DLC coating was oxidized by a tribochemical reaction which caused an increase in friction coefficient and wear rate when relative humidity of test environment increased.

关 键 词：类金刚石薄膜 摩擦磨损性能 相对湿度 

分 类 号：TH117.3[机械工程—机械设计及理论]