恒压式气体微流量计的性能测试  

Performance of Constant Pressure Gas Micro-flowmeter

作　　者：冯焱[1] 成永军[1] 赵定众 张涤新[1] 李得天[1] 

机构地区：[1]兰州物理研究所

出　　处：《真空科学与技术学报》2005年第3期217-221,共5页Chinese Journal of Vacuum Science and Technology

摘　　要：介绍了恒压式气体微流量计的组成及性能实验。实验结果表明,气体流量的测量范围为(2.96×10-9～4.76×10-4)Pa·m3/s,不确定度小于4%。标准漏孔的校准结果与德国PTB校准结果的一致性好于1.3%。The 2nd generation of high precision, constant pressure gas micro flowmeter has been developed. Evaluation tests show that its measurement ranges from （2.96×10^-9 to 4.76×10^-4） Pa·m^3/s and the uncertainty is less than 4%,The standard leak was calibrated by Lanzhou Institute of Physics（LIP） and FIB of Germany,respectively,with a difference less than 1.3%.

关 键 词：气体微流量计 性能评价 流量测量 流量标准 校准 

分 类 号：TB77[一般工业技术—真空技术] TN107[电子电信—物理电子学]