A Into-Plane Rotating Micromirror Actuated by a Hybrid Electrostatic Driving Structure  

复合静电驱动结构致动的内旋转微镜(英文)

作　　者：吴文刚[1] 陈庆华[1] 尹冬青[2] 闫桂珍[1] 陈章渊[2] 郝一龙[1] 徐安士[2] 

机构地区：[1]北京大学微电子学研究院微米/纳米加工技术国家级重点实验室,北京100871 [2]北京大学电子学系区域光纤通信网与新型光纤系统国家重点实验室,北京100871

出　　处：《Journal of Semiconductors》2005年第9期1699-1704,共6页半导体学报（英文版）

基　　金：国家自然科学基金(批准号:60278028);北京市国家技术创新计划(批准号:772167384624)资助项目

摘　　要：A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabricated in SOI substrate by using a bulk-and-surface mixed silicon micromachining process. As demonstrated by experiment, the novel driving structure can actuate the mirror to achieve large-range continuous rotation as well as spontaneous 90°rotation induced by the pull-in effect. The continuous rotating range of the micromirror is increased to about 46° at an increased yielding voltage. The measured yielding voltages of the mirrors with torsional springs of 1 and 0.5μm in thickness are 390 - 410V and 140 - 160V, respectively. The optical insertion loss has also been measured to be --1.98dB when the mirror serves as an optical switch.报道了以体硅表面硅混合微加工工艺制作在SOI衬底上的一种新型复合静电驱动结构致动内旋转微镜,其中复合静电驱动结构由一个平板驱动器和一个垂直梳齿驱动器构成.实验表明,该新型驱动结构不仅能使微镜实现大范围连续旋转,而且能使微镜实现吸合效应致自发性90°旋转.微镜的连续旋转范围扩大到约46°,同时引发吸合效应的拐点电压也增大.对于具有1和0.5μm厚扭转弹性梁的微镜,实测拐点电压分别为390～410V和140～160V.当该微镜用作光开关时,测得光插入损耗为-1.98dB.

关 键 词：MICROMIRROR hybrid electrostatic driving structure planar plate drive vertical comb drive mixed sil icon micromachining 

分 类 号：TN305[电子电信—物理电子学]