MICROMIRROR

作品数:19被引量:30H指数:4
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相关领域:机械工程更多>>
相关作者:尹冬青闫桂珍陈庆华陈章渊徐安士更多>>
相关机构:北京大学更多>>
相关期刊:《Control Theory and Technology》《Microsystems & Nanoengineering》《Journal of Mechanics Engineering and Automation》《Semiconductor Photonics and Technology》更多>>
相关基金:国家自然科学基金上海市浦江人才计划项目北京市自然科学基金国家教育部博士点基金更多>>
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A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors
《Microsystems & Nanoengineering》2024年第3期169-180,共12页Xingchen Xiao Ting Mao Yingchao Shi Kui Zhou Jia Hao Yiting Yu 
supported by the National Natural Science Foundation of China(51975483);Key Research Projects of Shaanxi Province(2020ZDLGY01-03);Natural Science Foundation of Ningbo Municipality(202003N4033).
As one of the most common spatial light modulators,linear micromirror arrays(MMAs)based on microelectromechanical system(MEMS)processes are currently utilized in many fields.However,two crucial challenges exist in the...
关键词:MIRROR exceptional anodic 
A robust lateral shift free(LSF)electrothermal micromirror with flexible multimorph beams被引量:1
《Microsystems & Nanoengineering》2023年第4期303-314,共12页Hengzhang Yang Anrun Ren Yingtao Ding Lei Xiao Teng Pan Yangyang Yan Wenlong Jiao Huikai Xie 
The authors would like to acknowledge the help of the staff from the Center of Nanofabrication,Tsinghua University for device fabrication.
Electrothermal bimorph-based scanning micromirrors typically employ standard silicon dioxide(SiO_(2))as the electrothermal isolation material.However,due to the brittle nature of SiO_(2),such micromirrors may be incap...
关键词:MIRROR ACCELERATION replace 
Technologies and applications of silicon-based micro-optical electromechanical systems:A brief review被引量:5
《Journal of Semiconductors》2022年第8期24-32,共9页Shanshan Chen Yongyue Zhang Xiaorong Hong Jiafang Li 
supported by the National Natural Science Foundation of China under Grant No.61975016;the Science and Technology Project of Guangdong(2020B010190001);Natural Science Foundation of Beijing Municipality(1212013 and Z190006);Beijing Municipal Science&Technology Commission,Administrative Commission of Zhongguancun Science Park No.Z211100004821009;Cultivation Project for Basic Research and Innovation of Yanshan University No.2021LGQN021.
Micro-optical electromechanical systems(MOEMS)combine the merits of micro-electromechanical systems(MEMS)and micro-optics to enable unique optical functions for a wide range of advanced applications.Using simple exter...
关键词:MOEMS Si-based micromachining technology MICROMIRROR MICRO-SPECTROMETER optical switches 
Stability analysis of quasicrystal torsion micromirror actuator based.on the strain gradient theory
《Acta Mechanica Sinica》2022年第3期119-131,I0003,共14页Yunzhi Huang Miaolin Feng Xiuhua Chen 
supported by the National Natural Science Foundation of China(Grant Nos.11572191,51701117,and 51779139).
Electrostatic torsional micromirrors are widely applied in the fields·of micro-optical switches,optical attenuators,optical scanners,and optical displays.In previous lectures,most of the micromirrors were twisted alo...
关键词:QUASICRYSTALS Torsion micromirror INSTABILITY Strain gradient theory 
Anti-scattering light focusing by fast wavefront shaping based on multi-pixel encoded digital-micromirror device被引量:12
《Light(Science & Applications)》2021年第8期1527-1535,共9页Jiamiao Yang Qiaozhi He Linxian Liu Yuan Qu Rongjun Shao Bowen Song Yanyu Zhao 
Shanghai Municipal of Science and Technology Project(No.20JC1419500);Foundation of National Facility for Translational Medicine(Shanghai)(No.TMSK-2020-129);Shanghai Pujiang Program(NO.20PJ 1408700);National Natural Science Foundation of China(No.62005007);the Fundamental Research Funds for the Central Universities(Beihang University).
Speed and enhancement are the two most important metrics for anti-scattering light focusing by wavefront shaping(WS),which requires a spatial light modulator with a large number of modulation modes and a fast speed of...
关键词:mirror light OVERCOME 
A micromirror array with annular partitioning for high-speed random-access axial focusing被引量:6
《Light(Science & Applications)》2020年第1期241-255,共15页Nathan Tessema Ersumo Cem Yalcin Nick Antipa Nicolas Pegard Laura Waller Daniel Lopez Rikky Muller 
the McKnight Technological Innovations in Neuroscience Award as well as the Burroughs Wellcome Fund Career Award At the Scientific Interface(5113244)to N.P;supported by the U.S.Department of Energy,Office of Science,under Contract No.DE-AC02-06CH11357.
Dynamic axial focusing functionality has recently experienced widespread incorporation in microscopy,augmented/virtual reality(AR/VR),adaptive optics and material processing.However,the limitations of existing varifoc...
关键词:MIRROR AXIAL RANDOM 
Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System
《IEEE/CAA Journal of Automatica Sinica》2019年第4期1060-1067,共8页Hui Chen Zhendong Sun Weijie Sun John Tze Wei Yeow 
supported by the National Natural Science Foundation of China(61374036,61703142,U1504615);the Natural Science and Engineering Research Council of Canada;the Scientific Research Key Foundation of Higher Education Institutions of Henan Province(16A413001)
In this paper,we present a twisting control scheme with proportional-integral-derivative(PID)sliding surface for a two-axis electrostatic torsional micromirror,and the utilization of the proposed scheme in a laser sca...
关键词:Electrostatic micromirror IMAGING microelectromechanical system(MEMS) twisting algorithm 
Bifurcation-Based Stability Analysis of Electrostatically Actuated Micromirror as a Two Degrees of Freedom System
《Computer Modeling in Engineering & Sciences》2018年第3期261-276,共16页Kuntao Ye Yan Luo Yingtao Jiang 
This work is supported by the National Natural Science Foundation of China(Project 61368004);the Fund of National High-level Overseas Talent Returning([2011]481);a scholarship from China Scholarship Council(No.201703000001).
Torsional micromirror devices have been widely used in micro displays,RF switches,optical communications,and optical coherence tomography systems.In order to study the stability of electrostatically driven torsional m...
关键词:MEMS MICROMIRROR BIFURCATION PULL-IN stability phase trajectories DOF 
Three-channel dual-wavelength fiber laser based on a digital micromirror-device processor and photonic crystal fiber
《Chinese Optics Letters》2015年第4期50-53,共4页王涛 刘刚 李殷 颜玢玢 陈笑 桑新柱 余重秀 Feng Xiao Alameh Kamal 
supported by the National Basic Research Program of China(2010CB327600);the Fundamental Research Funds for the Central Universities(2013RC1202);the Specialized Research Fund for the Doctoral Program of Higher Education(20120005120021);the Program for New Century Excellent Talents in University(NECT-11-0596);the Beijing Nova program(2011066)
A stable three-channel dual-wavelength fiber ring laser is proposed and experimentally demonstrated. The dig- ital mieromirror-deviee (DMD) processor can select and reeirculate any dual waveband from the gain spectr...
关键词:PCF HN Three-channel dual-wavelength fiber laser based on a digital micromirror-device processor and photonic crystal fiber DMD FWM 
Integral sliding mode based optimal composite nonlinear feedback control for a class of systems被引量:1
《Control Theory and Technology》2014年第2期139-146,共8页Zhou ZHENG Weijie SUN Hui CHEN John T. W. YEOW 
This work was supported by National Natural Science Foundation of China (No. 61374036) and the Fundamental Research Funds for the Central Universities (No. SCUT 2014ZM0035).
This paper presents an optimization method of designing the integral sliding mode (ISM) based composite nonlinear feedback (CNF) controller for a class of low order linear systems with input saturation. The optima...
关键词:Composite nonlinear feedback Integral sliding mode Input saturation PSO MICROMIRROR 
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