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supported by the National Natural Science Foundation of China(51975483);Key Research Projects of Shaanxi Province(2020ZDLGY01-03);Natural Science Foundation of Ningbo Municipality(202003N4033).
As one of the most common spatial light modulators,linear micromirror arrays(MMAs)based on microelectromechanical system(MEMS)processes are currently utilized in many fields.However,two crucial challenges exist in the...
The authors would like to acknowledge the help of the staff from the Center of Nanofabrication,Tsinghua University for device fabrication.
Electrothermal bimorph-based scanning micromirrors typically employ standard silicon dioxide(SiO_(2))as the electrothermal isolation material.However,due to the brittle nature of SiO_(2),such micromirrors may be incap...
supported by the National Natural Science Foundation of China under Grant No.61975016;the Science and Technology Project of Guangdong(2020B010190001);Natural Science Foundation of Beijing Municipality(1212013 and Z190006);Beijing Municipal Science&Technology Commission,Administrative Commission of Zhongguancun Science Park No.Z211100004821009;Cultivation Project for Basic Research and Innovation of Yanshan University No.2021LGQN021.
Micro-optical electromechanical systems(MOEMS)combine the merits of micro-electromechanical systems(MEMS)and micro-optics to enable unique optical functions for a wide range of advanced applications.Using simple exter...
supported by the National Natural Science Foundation of China(Grant Nos.11572191,51701117,and 51779139).
Electrostatic torsional micromirrors are widely applied in the fields·of micro-optical switches,optical attenuators,optical scanners,and optical displays.In previous lectures,most of the micromirrors were twisted alo...
Shanghai Municipal of Science and Technology Project(No.20JC1419500);Foundation of National Facility for Translational Medicine(Shanghai)(No.TMSK-2020-129);Shanghai Pujiang Program(NO.20PJ 1408700);National Natural Science Foundation of China(No.62005007);the Fundamental Research Funds for the Central Universities(Beihang University).
Speed and enhancement are the two most important metrics for anti-scattering light focusing by wavefront shaping(WS),which requires a spatial light modulator with a large number of modulation modes and a fast speed of...
the McKnight Technological Innovations in Neuroscience Award as well as the Burroughs Wellcome Fund Career Award At the Scientific Interface(5113244)to N.P;supported by the U.S.Department of Energy,Office of Science,under Contract No.DE-AC02-06CH11357.
Dynamic axial focusing functionality has recently experienced widespread incorporation in microscopy,augmented/virtual reality(AR/VR),adaptive optics and material processing.However,the limitations of existing varifoc...
supported by the National Natural Science Foundation of China(61374036,61703142,U1504615);the Natural Science and Engineering Research Council of Canada;the Scientific Research Key Foundation of Higher Education Institutions of Henan Province(16A413001)
In this paper,we present a twisting control scheme with proportional-integral-derivative(PID)sliding surface for a two-axis electrostatic torsional micromirror,and the utilization of the proposed scheme in a laser sca...
This work is supported by the National Natural Science Foundation of China(Project 61368004);the Fund of National High-level Overseas Talent Returning([2011]481);a scholarship from China Scholarship Council(No.201703000001).
Torsional micromirror devices have been widely used in micro displays,RF switches,optical communications,and optical coherence tomography systems.In order to study the stability of electrostatically driven torsional m...
supported by the National Basic Research Program of China(2010CB327600);the Fundamental Research Funds for the Central Universities(2013RC1202);the Specialized Research Fund for the Doctoral Program of Higher Education(20120005120021);the Program for New Century Excellent Talents in University(NECT-11-0596);the Beijing Nova program(2011066)
A stable three-channel dual-wavelength fiber ring laser is proposed and experimentally demonstrated. The dig- ital mieromirror-deviee (DMD) processor can select and reeirculate any dual waveband from the gain spectr...
This work was supported by National Natural Science Foundation of China (No. 61374036) and the Fundamental Research Funds for the Central Universities (No. SCUT 2014ZM0035).
This paper presents an optimization method of designing the integral sliding mode (ISM) based composite nonlinear feedback (CNF) controller for a class of low order linear systems with input saturation. The optima...