Technologies and applications of silicon-based micro-optical electromechanical systems:A brief review  

作　　者：Shanshan Chen Yongyue Zhang Xiaorong Hong Jiafang Li 

机构地区：[1]Key Laboratory for Microstructural Material Physics of Hebei Province,School of Science,Yanshan University,Qinhuangdao 066004,China [2]Key Laboratory of Advanced Optoelectronic Quantum Architecture and Measurement(Ministry of Education),Beijing Key Laboratory of Nanophotonics&Ultrafine Optoelectronic Systems,and School of Physics,Beijing Institute of Technology,Beijing 100081,China [3]Yangtze Delta Region Academy of Beijing Institute of Technology,Jiaxing 314019,China

出　　处：《Journal of Semiconductors》2022年第8期24-32,共9页半导体学报（英文版）

基　　金：supported by the National Natural Science Foundation of China under Grant No.61975016;the Science and Technology Project of Guangdong(2020B010190001);Natural Science Foundation of Beijing Municipality(1212013 and Z190006);Beijing Municipal Science&Technology Commission,Administrative Commission of Zhongguancun Science Park No.Z211100004821009;Cultivation Project for Basic Research and Innovation of Yanshan University No.2021LGQN021.

摘　　要：Micro-optical electromechanical systems(MOEMS)combine the merits of micro-electromechanical systems(MEMS)and micro-optics to enable unique optical functions for a wide range of advanced applications.Using simple external electromechanical control methods,such as electrostatic,magnetic or thermal effects,Si-based MOEMS can achieve precise dynamic optical modulation.In this paper,we will briefly review the technologies and applications of Si-based MOEMS.Their basic working principles,advantages,general materials and micromachining fabrication technologies are introduced concisely,followed by research progress of advanced Si-based MOEMS devices,including micromirrors/micromirror arrays,micro-spectrometers,and optical/photonic switches.Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing,they have several promising applications in optical communications,digital light processing,and optical sensing.Finally,future research and development prospects of Si-based MOEMS are discussed.

关 键 词：MOEMS Si-based micromachining technology MICROMIRROR MICRO-SPECTROMETER optical switches 

分 类 号：TH-39[机械工程]