激光图形发生器调焦系统设计  

Design of Focusing System in Laser Pattern Generator

作　　者：梁宜勇[1] 白剑[1] 杨国光[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,浙江杭州310027

出　　处：《光电子．激光》2005年第10期1202-1205,共4页Journal of Optoelectronics·Laser

摘　　要：为提高激光图形发生器的线条制作精度和制作效率,设计了新的调焦系统。调焦采用光学离轴探测原理,调焦辅助光源直接采用半导体激光器(LD)的准直椭圆光束,探测器为二象限光电池,离焦信号则采用除法构建。调焦系统具有过阻尼的二阶系统特征,新嵌入的PID控制器提升了系统的动态性能,并使系统闭环精度达0.2μm离焦量,同时能产生预期的基于不同离焦量的变线宽图形。In order to improve the accuracy and efficiency of fabricating lines with laser pattern generator, a novel focusing system was designed. Focusing system is based on optical off-axis detection principles. The detector is a two-quadrant photocell, and the defocus sig- nal is constructed by division. Focusing system has the characteristic of second-order system with overdamp. The new embedded PID controller improves the performance of focusing system and upgrades the closed-loop precision to 0. 2μm. Furthermore, focusing system has the fabrication capabilities for variable-width lines under various defocus amount.

关 键 词：激光图形发生器 光学调焦 离焦量 动态特性 

分 类 号：TN249[电子电信—物理电子学]