酸浸+等离子体刻蚀YG6微米-纳米金刚石复合涂层工具研究  

Study of micro-nanocrystalline composite diamond coatings on cemented carbide cutting tools—— acid+plasmas etching method

作　　者：苗晋琦[1] 张鬲君[2] 王成彪[1] 吕建国[1] 唐伟忠[3] 吕反修[3] 

机构地区：[1]中国地质大学,武汉430074 [2]中原工学院,郑州450007 [3]北京科技大学,北京100083

出　　处：《金刚石与磨料磨具工程》2005年第5期18-23,共6页Diamond & Abrasives Engineering

基　　金：国家高技术研究与发展计划新材料领域"九五"重大项目(No.863-715-Z38-03)

摘　　要：金刚石涂层工具一直是金刚石膜工具应用研究的主流。制约其产业化的主要因素是涂层的附着力低和微晶金刚石涂层工具的加工精度差。通过对衬底的有效预处理和CVD沉积过程控制的研究,开发在硬质合金基体上沉积高结合强度、低粗糙度的金刚石涂层新技术,对于实现CVD金刚石涂层刀具高效、高精度切削加工具有重要意义。对旨在提高金刚石涂层附着力的预处理技术,本文探索了将酸蚀脱钴+等离子体刻蚀处理衬底法。利用优化的沉积工艺,在酸浸+等离子刻蚀处理的YG6刀片上沉积的两层金刚石复合膜表面粗糙度为0.13μm,附着力压痕测试临界载荷大于1500N。金刚石涂层工具的切削加工性能明显高于无涂层硬质合金工具。在加工ZA lS i12合金时,单层和两层金刚石涂层车刀片的切削寿命分别是无涂层车刀片切削寿命的21倍和28倍。The diamond coated tools has heen the mainstream of diamond film tools all the time. The key, which restricts the diamond coated tools from market applications, is the low adhesion and the poor machining accuracy, Development of the new technology for depositing high adhesion strength and low roughness diamond coatings on the body of hard metal, through the effective pretreatment for the substrate and the control of the CVD process, is of significance for achieving the technology of CVD diamond coating tools with high-efficient and high accuracy machining. To improve the adhesion of the diamond films to the WC-6% Co insert substrate, this paper explored the acid etching ＋ the plasmas etching method, By using the optimized deposition technology, two layers of diamond films with the roughness 0.13μm can be deposited on the boronizing ＋ two-step pretreated YG6 cutters, its critical load that indicated the coating adhesion was greater than 1500N. The cutting performance of the diamond coating tools is much higher than the uncoated diamond tools obviously. And the cutting life of the coated turning cutter with single or two layers diamond film is about 21 times and 28 times longer than that of the uncoated tools.

关 键 词：硬质合金 金刚石复合涂层 附着力 切削性能 

分 类 号：TF125.34[冶金工程—粉末冶金]