光刻伺服盘媒体微细加工技术  

Media Microfabrication Technology of the Etched Servo Disk

作　　者：罗敢[1] 郑朝晖[1] 张江陵[1] 赫连娜 胡学骏 

机构地区：[1]华中理工大学

出　　处：《武汉工业大学学报》1996年第3期76-78,共3页

基　　金：国家自然科学基金重点项目

摘　　要：阐述了光刻伺服盘媒体微细加工实验过程，分析了刻蚀工艺中影响磁盘光刻图形的不利因素，实践证明利用半导体微细加工技术光刻伺服盘，能大幅度提高磁道密度，增加磁盘驱动器的容量。In this paper we explored the experiment process of media microfabrication of Etched Servo Disk and then unalyzed the disadvantages influence the etched graph in etching technique.Practices have proved that with the Etched Servo Disk made through the technique of semiconductor microfabrication. The truck density and then the capacity of Magnetic Disk Driver can be improved greatly.That is an advenced and practica way.

关 键 词：光刻伺服盘 刻蚀 微细加工 磁盘存储器 媒体 

分 类 号：TQ587.2[化学工程—精细化工]