椭偏法测试聚合物薄膜折射率的研究  

The Refractive Index Measurement of Polymer Films with Ellipsometry

作　　者：周建华[1] 游佰强[1] 陈振兴 肖磊[1] 王静[3] 

机构地区：[1]厦门大学电子工程系,福建厦门361005 [2]厦门晶尊微电子科技有限公司,福建厦门361002 [3]厦门大学材料科学工程系,福建厦门361005

出　　处：《光电子技术与信息》2005年第5期26-29,共4页Optoelectronic Technology & Information

基　　金：福建省青年科技人才创新项目资金资助(2001J024)

摘　　要：针对聚合物PMMA改性光波导研制的需求,自建了一台变入射角、开放光路、适用范围更广的椭偏测试仪。通过实际测量聚合物PMMA改性薄膜,并与国内椭偏仪实测数据进行对比分析,表明本系统的实验数据更为可信。在此基础上还用本系统实测了几种常用光刻胶薄膜,通过估算和分析它们的折射率在日照前后的变化, 进一步验证本系统的可行性和适应性。论文最后对此类系统设置要点进行了归纳,为系统今后的改进提供参考。For the requirement of studying PMMA polymer optical waveguides, a prototype ellipsometry with variable incidence angle, open optical circuit and widely applied range was established. By measuring PMMA polymer film with this system and other domestic ellipsometries, it is presented that the experimental data from the former is more reliable. Moreover, several kinds of photo-resist films were measured. Then their refractive index changes before and after light illuminating were estimated and analyzed, that proves the feasibility and adaptability of this system. Finally, some principal points about the system setup are induced for its further improvement.

关 键 词：聚合物薄膜 椭圆偏振仪 折射率 膜厚 

分 类 号：TB43[一般工业技术]