动态测量光栅测长仪的位置误差  

Dynamic measurement of position error for grating length gauge

作　　者：刘春山[1] 陈晓怀[1] 程真英[1] 

机构地区：[1]合肥工业大学仪器仪表学院,安徽合肥230009

出　　处：《工业计量》2005年第5期10-12,共3页Industrial Metrology

基　　金：国家自然科学基金重点资助项目(项目号:50275047)

摘　　要：介绍了一种光栅测量系统动态位置精度评定的方法,以现有的光栅测长仪为研究对象,高精度HP5529A双频激光干涉仪作为校准系统。利用光栅测长仪编码器产生的A-quad-B脉冲信号触发激光干涉仪进行同步动态数据采集,由激光干涉仪软件来获取和显示位置误差数据,并绘制更真实详细的动态误差图。最后对动态误差实验结果进行分析和讨论。Taking existing grating length gauge as research object, a dynamic position accuracy evaluation method of grating measuring system is introduced. High precision Hewlett Packard 5529A laser interferometer was used as calibration system. A- quad-B pulse from encoder of grating length gauge is used to trigge laser interferometer and carry out dynamic data acquisition. Software package of HP laser interferometer is used to implement data acquisition and presentation of position error, and reahstic and detailed picture of dynamic error is drawn. Results are analysed and discussed.

关 键 词：光栅 动态误差 A-quad-B脉冲 激光干涉 

分 类 号：TH711[机械工程—测试计量技术及仪器]