无氢类金刚石膜的光致发光特性研究  

Study of Structure and Photoluminescence Properties of the Unhydrogenated Diamond-like Carbon Thin Film

作　　者：陈达[1] 李清山[1] 王璟璟[1] 郑学刚[1] 赵波[1] 张宁[1] 杨亚军[1] 石明吉[1] 

机构地区：[1]曲阜师范大学物理工程学院,山东曲阜273165

出　　处：《江西科学》2005年第5期534-537,共4页Jiangxi Science

摘　　要：使用脉冲激光沉积(PLD)技术制备了系列无氢类金刚石(DLC)薄膜,测量了样品的Ram an光谱、光吸收和光致发光,研究了光致发光与制备条件的依赖关系。结果表明,这种薄膜是有少量sp2键和sp3键组成的非晶碳膜。薄膜的光学带隙在1.68~2.46 eV,发光在可见光区呈宽带结构。沉积温度对类金刚石薄膜的结构和发光性质有较大影响。当沉积温度从室温升高至400℃时,sp2团簇的长大使C原子的有序度增强,从而导致薄膜的光学带隙变窄,发光峰红移且半高宽变小。Unhydrogenated Diamond-like films were prepared by pulse laser deposition technique at different substrate temperature.The Raman spectra,the absorption and the photoluminescence spectra were measured.The dependence of structure and photoluminescence properties on deposition temperature was detailed studied.Our experiment results indicate that the films are composed of fewer sp^2 C bonds and larger sp^3 C bonds.The optical gaps vary in the range of 1.68~2.46 eV and the photoluminescence spectra is a board band with peak position in the range of visible light.The deposition temperature obviously influences the structure and the photoluminescence properties.When the deposition temperature increase from RT to 400 ℃,the sp^2 C atom clusters grow and C atoms ordering occurred in the films,leading to the optical gaps becoming narrower,the photoluminescence peak red-shift and the FWHM becoming narrower.

关 键 词：脉冲激光沉积 类金刚石薄膜 拉曼光谱 光致发光 

分 类 号：O484.5[理学—固体物理]