TFA-MOD方法制备YBCO超导薄膜研究  

INVESTIGATION OF PREPARING YBCO SUPERCONDUCTING FILM BY TFA-MOD METHOD

作　　者：崔旭梅[1] 陶伯万[1] 陈家俊[1] 李言荣[1] 刘兴钊[1] 

机构地区：[1]电子科技大学微电子与固体电子学院

出　　处：《低温物理学报》2005年第4期344-348,共5页Low Temperature Physical Letters

摘　　要：采用TFA-MOD方法在LaAlO3(001)单晶基片上制备了性能良好的YBCO超导薄膜:临界电流密度(Jc)可达3MA/cm2(77K,0T),超导转变温度Tc≈90K,转变宽度ΔTc=0.5K,其一次涂层厚度达338nm.通过X射线衍射(XRD)分析表明YBCO具有纯c-轴取向、无a-轴取向的晶粒存在.ω扫描分析表明该YBCO薄膜具有很好的面外外延性,其摇摆曲线的半高宽(FWHM)为0.653°.用SEM分析也表明膜的表面无裂纹存在,表面平整,没有a轴晶粒生长.Epitaxial YBCO superconducting thin film with a thickness of 338 nm have been deposited by trifluoraeetie acid-metal organic deposition method on single crystalline LaAlO3（001）substrate. Jc value, at 77K and self-field, as high as 3MA/cm^2. and its Tc≈90K,△Tc=0. 5K ,respectively. X-ray characterization of film shows a strong tendency of （001） texture. X-ray ω-scan of the film shows the film has good out-of-plane texture with FWHM of 0. 653°, and scanning electron mierograph of it shows it has an smooth and crack-free surface.

关 键 词：TFA-MOD YBCO 超导薄膜 YBCO超导薄膜 制备 临界电流密度 超导转变温度 YBCO薄膜 晶粒生长 X射线衍射 SEM分析 涂层厚度 

分 类 号：O511.3[一般工业技术—材料科学与工程]