在纳米压入仪上进行悬臂梁法测量弹性模量的影响因素分析  

Analysis of the Influence Factors on the Measurement of Elastic Modulus Using the Microcantilever Deflection on a Nanoindenter

作　　者：朱强[1] 蒋庄德[1] 赵则祥[2] 王海容[1] 杨树明[1] 

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,陕西西安710049 [2]中原工学院,河南郑州450007

出　　处：《稀有金属材料与工程》2005年第11期1842-1845,共4页Rare Metal Materials and Engineering

基　　金：国家重点基础研究发展规划项目(G1999033103)

摘　　要：对在纳米压入仪上进行悬臂梁法测量弹性模量的主要影响因素进行了综合分析,主要包括加载系统悬置弹簧刚度、压头压入、梁沿截面宽度方向挠曲、梁支座附加挠曲等影响。在考虑这些因素的基础上,得到了悬臂梁的有效挠度,利用有效挠度与载荷之间的关系,评价悬臂梁材料的弹性模量。对单晶硅(100)悬臂梁试样进行了实验,得到其弹性模量为155GPa±9.5%GPa,与参考文献值符合较好。表明在纳米压入仪上进行悬臂梁法测量,只有综合这些影响因素后,才能获得有效、准确的弹性模量测量结果。The primary influence factors wes analyzed synthetically for measuring the elastic modulus on a nano indenter by the method of microcantilever deflection, which include stiffness of suspending springs of the loading system, local penetration of the indenter tip, curvature across the micro cantilever beam＇s width, and compliance of the beam support. Taking these influences into account, the effective deflection can be obtained, which is combined with the bending load to evaluate elastic modulus of the microcantilever beam. Some experiments of micro cantilever beam specimens of Si （100） were carried out, and their evaluated elastic modulus is 155±9.5% GPa, which is agreeable with the relative literature＇s result. Therefore, for measuring the elastic modulus accurately using the microcantilever deflection on a nano indenter, some influence factors should be synthetically considered.

关 键 词：悬臂梁法 微构件 弹性模量 MEMS 纳米压入仪 

分 类 号：TH703[机械工程—仪器科学与技术]