微摩擦测试的微力传感器设计  

The Micro Force Sensor for Micro Friction Testing

作　　者：王梁[1] 程先华[1] 

机构地区：[1]上海交通大学机械与动力工程学院,上海200030

出　　处：《上海交通大学学报》2005年第11期1792-1794,1798,共4页Journal of Shanghai Jiaotong University

基　　金：国家自然科学基金资助项目(50475023);上海市纳米专项资助项目(0252nm014)

摘　　要：论述了一种新的应用于微摩擦测试的微力传感器,这种微力传感器能同时测定微小摩擦力及相应正压力的大小,其独特的悬臂结构消除了多维力传感器普遍关注的耦合问题.正压力和摩擦力的测力原理分别基于应变片法和位移法.标定及静态特性的分析表明,该微力传感器具有较高的测力精度和分辨力,适合于mN级的摩擦测试.摩擦测试实验表明,该微力传感器完全能进行各种润滑膜的微摩擦性能评估测试,从而为微摩擦研究提供了一种有效的实验工具.A new kind of micro force sensor was discussed, which has the capability of simultaneously measuring micro friction and corresponding normal force. Decoupling is reached by developing a special cantilever. The measuring of normal force and friction is based on the method of strain foil and displacement. As the results of static analysis, the sensor is of high accuracy and resolution. The actual friction measurement also indicates that the sensor is applicable to micro friction measuring on a wide range of conditions, and is an effective tool for the research of micro friction.

关 键 词：微摩擦 传感器 测量 微机电系统 

分 类 号：TG115.58[金属学及工艺—物理冶金]