二维平板光子晶体直波导的制备和光传输特性的测量  

Fabrication of straight waveguide in two-dimensional photonic crystal slab and its light propagation characteristics

作　　者：韩守振[1] 田洁[1] 冯帅[1] 任承[1] 李志远[1] 程丙英[1] 张道中[1] 

机构地区：[1]中国科学院物理研究所,北京100080

出　　处：《物理学报》2005年第12期5659-5662,共4页Acta Physica Sinica

基　　金：国家重点基础研究发展规划(批准号:2001CB610402);国家纳米科学中心(批准号:2003CB716900);国家自然科学基金(批准号:10404036)资助的课题.~~

摘　　要：利用聚焦离子束刻蚀的方法在SOI(silicon oninsulator)基片上制备了W3型二维光子晶体直波导.观察并测量了近红外激光通过光子晶体波导的散射图形和透过谱.实验结果说明,激光在有引入引出脊形波导的光子晶体直波导中具有很好的传输特性.Using focused ion beam lithograph, we fabricated W3 straight waveguide in two-dimensional photonic crystal slab on SOI （ silicon on insulator） wafer. The light propagation was observed on top and from the end of the sample. The transmission dip and mode distribution at the outlet of ridged waveguide were measured. The results show that light can propagate in the photonic crystal waveguide.

关 键 词：光子晶体波导 光子带隙 脊型波导 

分 类 号：TN204[电子电信—物理电子学]