智能化压力传感器的研制  

Frabrication of Intelligence Pressure Sensors

作　　者：尹志华[1] 范兆书[1] 孙以材[1] 张储林 

机构地区：[1]河北工业大学电子系

出　　处：《半导体杂志》1996年第3期21-29,共9页

摘　　要：本文主要介绍智能化硅压力传感器的微机检测、运算处理和控制。由平面工艺制成的硅压阻传感器，当其把压力信号转换为电信号后，经模拟通道的予处理，再由微机对检测的信号进行压力零点及灵敏度的温度补偿以及对压力非线性特性进行校正，最后对测量结果进行标度变换并显示。使传感器测量精度大大提高并具有程控、运算处理等功能。从而，可长期稳定地工作在环境温度变化较为频繁的场合。This paper is presented for the intelligence pressure sensor of the silicon piezoresistive type to introduce its microcomputer testing,operation process and controlling parts.After the electrical signal has been converted from the pressure signal of the silicon piezoresistance pressure sensor made by the plane technology,it is pre-processed through a analog channel.Then the temperature compensation of its offset and sensitivity of pressure and the correction of its linearity error are completed by using a microcomputer.The measurement results are converted and revealed into the pressure scale.Thus,the measurement precision of the sensor is greatly improved and the sensor has the function of programming controll and operation process.This intelligence sensor can steady work for a long term in the environment with frequently varing temperatures.

关 键 词：硅压阻 传感器 压力零点 压力灵敏度 温度补偿 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]