柔性膜微型电磁驱动器的设计与制作工艺  

Design and Fabrication of Micro Electromagnetic Actuator Based on Parylene Diaphragm

作　　者：苏宇锋[1] 陈文元[1] 陈晓梅[1] 张卫平[1] 王伟 

机构地区：[1]上海交通大学微米纳米技术研究院薄膜与微细技术教育部重点实验室,上海200030 [2]中船集团公司726研究所,上海200025

出　　处：《仪表技术与传感器》2005年第12期10-12,共3页Instrument Technique and Sensor

基　　金：教育部博士点基金(20010248001)

摘　　要：主要讨论了一种微型电磁驱动器的设计和制作工艺。该驱动器结构简单,由 Parylene 振动膜和硅基片两层组成,将驱动线圈与硅片集成在一起。对平面电磁线圈的驱动特性和驱动器振动膜的形变进行了分析,并对其关键尺寸进行优化。采用电镀工艺在硅基片上电镀驱动线圈,在 Parylene 薄膜上电镀 NiFe 合金阵列,采用牺牲层工艺得到振动膜的悬空结构。Presented the design and fabrication of a micro electromagnetic actuator, which composed of two layers. One layer is a Parylene diaphragm with an electroplated NiFe array, the other layer is a silicon wafer with a coil on it. Analyzed the actuating character of the coil and the Parylene diaphragm, and optimize the dimension of NiFe posts. Electroplating was adopted to fabricate the coil on the silicon and the NiFe array on the Parylene diaphragm, and sacrificial layer technology was employed to release the diaphragm from the silicon wafer.

关 键 词：PARYLENE 制作工艺 柔性膜微型电磁驱动器 NiFe合金阵列 

分 类 号：TP215[自动化与计算机技术—检测技术与自动化装置] TP271.4[自动化与计算机技术—控制科学与工程]