计量圆光栅动态精度的检测技术  

Dynamic Measurement Technology of Grating′s Precision

作　　者：费斌[1,2] 徐文雄[1,2] 蒋庄德 范裕健[1,2] 

机构地区：[1]西安交通大学 [2]Eindhoven技术大学

出　　处：《仪器仪表学报》1996年第5期525-529,共5页Chinese Journal of Scientific Instrument

摘　　要：本文探讨了计量圆光栅的精度检测问题，提出了一种新的动态检测方法。它不同于目前普遍采用的标准多面棱体静态检测法，后者只能得到圆光栅静止于圆周内若干等分位置的静态误差，而前者采用频谱分析方法、借助计算机处理，实现对圆光栅动态地、连续测量，最终得到其误差函数Ｒ（θ）。本方法采用软件修正技术剔除安装偏心等系统误差，硬件系统使用了高精度的脉冲计数电路，使得检测系统的精度大为提高，并且排除了测量过程中，环境或人为因素对检测精度的影响。本文对这种光栅动态检测技术的原理及应用进行了研究。A new dynamic method for the measurement of grating encoder has been developed and conducted in this paper.Unlike the method generally used at present which can only gets encoder error at very limited points, the new one accepts the method of spectrum analysis to measure errors of the encoder by means of computer and gets its error function R(θ).The principle and applications of the new method are investigated .And practical experiments as well as precision estimation are introduced in the paper. Using accuracy cunter and error modify technology by means of software to delete systematic error. The new method can not only gets accuracy result, but aslo removes influence of artifact and environment.

关 键 词：圆光栅 精度 检测 测角度仪器 计量圆光栅 

分 类 号：TH741.2[机械工程—光学工程]