飞秒激光加工微光学元件的研究  

Fabrication of Microoptical Elements with Femtosecond Laser

作　　者：孙晓慧[1] 周常河[2] 

机构地区：[1]上海工程技术大学基础教学学院,上海201600 [2]中国科学院上海光学精密机械研究所,上海201800

出　　处：《中国激光》2006年第1期133-137,共5页Chinese Journal of Lasers

摘　　要：利用低功率飞秒激光振荡器进行材料表面加工的研究并将其应用于微光学元件的加工制作领域;对飞秒激光倍频光以及飞秒激光与光刻胶材料相互作用进行了实验;以光刻胶作为牺牲层进行表面加工获得了各种玻璃光栅及光掩模板;利用光学显微镜和原子力显微镜(AFM)对实验结果进行检测,得到微米量级的特征线宽;所得光栅的光学性能通过He-Ne激光器进行检测,实验结果与理论值一致。该研究为微光学元件的加工制作提供了新的方法。Novel fabrication of microoptical elements with the low power femtosecond laser oscillator is described. Besides reducing the cost and complexity of the laser system, femtosecond laser oscillator permits faster and more efficient fabrication. Various glass gratings and photomasks are obtained through the surface fabrication of the photoresist layer as the sacrificial layer. The photomasks and microoptical elements with smooth edges have been obtained and checked with a conventional optical microscopy and atomic force micorscopy （AFM）. The optical properties of the obtained gratings are examined by He-Ne laser. It demonstrates that the experimental result is in agreement with the theoretical value.

关 键 词：激光技术 飞秒激光 表面加工 烧蚀 微光学 

分 类 号：TN249[电子电信—物理电子学] TN405