Sb_2O_3掺杂对ZnO薄膜光吸收性能的影响  

Effect of Sb_2O_3-doped on Optical Absorption of ZnO Thin Film

作　　者：常春荣[1] 李子全[1] 徐芸芸[1] 

机构地区：[1]南京航空航天大学材料科学与技术学院,江苏南京210016

出　　处：《光电子．激光》2006年第1期41-44,共4页Journal of Optoelectronics·Laser

基　　金：南京大学近代声学国家重点实验室基金资助项目(0201)

摘　　要：采用RF磁控溅射技术制备了Sb2O3掺杂ZnO薄膜,通过X射线光电子能谱仪(XPS)、X射线衍射仪(XRD)和紫外-可见光(UV-Vis)分光光度计研究了Sb2O3对ZnO薄膜结构和光吸收性能的影响。结果表明:Sb2O3的掺杂影响了ZnO的原子和电子状态、晶粒的生长方式和光吸收性能。薄膜中Sb以多种形态存在:替位原子和化合物(Sb2O3、Zn7Sb2O14)等,ZnO呈混晶方式生长;随着Sb含量的增加,其引起的晶格畸变和次晶相的含量逐渐增加;掺杂薄膜在远紫外(UVA)波段的吸收显著增强,UV吸收峰变窄,强度增大,吸收边变得陡峭且向短波方向移动达5 nm,在Vis波段的吸收有所增强。Sb2O3 -doped ZnO thin film was prepared by RF magnetron sputtering technique. The influence of Sb2O3 on the ZnO thin film＇structure and optical absorption was studied by XPS, XRD apparatuses and UV-Vis spectrophotometer. Results show that Sb2O3 doping has affected ZnO＇ atomic and electronic structures, crystal grains＇ growth modes and optical absorption. The element Sb exists in many forms in the film.transpositional atoms and compounds such as Sb2O3 ,Zn7 Sb2O14 etc. ZnO crysal grains grow in mixing directions. The lattice relaxation and content of second phases increase when more Sb is doped. The UVA absorption of doped ZnO thin film obviously increases. The ultraviolet absorption peak narrows,the absorption intensity increases, the absorption margin becomes steep and moves to shorter wavelength about 5 nm,and the visible absorption increases in some sort.

关 键 词：掺杂ZnO薄膜 SB2O3 光吸收 

分 类 号：TB383[一般工业技术—材料科学与工程]