一种新型溶胶-凝胶方法制备ZnO薄膜的椭圆偏振光谱研究  

Ellipsometry Study on the ZnO Thin Film Prepared by A Novel Sol-Gel Method

作　　者：唐利斌[1] 郑云[1] 吴刚[1] 姬荣斌[1] 宋炳文[1] 黄晖[1] 

机构地区：[1]昆明物理研究所,云南昆明650223

出　　处：《红外技术》2006年第1期7-11,共5页Infrared Technology

基　　金：本研究受云南省自然科学基金面上项目(2004E0055M);云南省自然科学基金重点项目(2003E0012Z)资助

摘　　要：使用一种新型的溶胶-凝胶方法制备了ZnO薄膜,此方法的特点在于操作简单、无毒、实用。此方法可在非单晶基片(如玻璃、石英等)上制备最大晶粒尺寸大于100 nm的大面积ZnO薄膜。利用椭圆偏振光谱观察到了所制备ZnO薄膜折射率随光子能量的增加在光子能量等于禁带宽度处出现峰值的现象;计算了ZnO薄膜的光学带隙;证明了ZnO薄膜中存在由氧空位和锌间隙原子在带隙中引入的缺陷能级。A new Sol-Gel technique to prepare ZnO solid thin film was suggested, the characteristics of this technique are simple, nontoxic, practical. The technique may prepare the large-area ZnO thin film with the largest crystal size bigger than 100 nm on non single crystal substrates such as glass and silica. By means of Ellipsometry technique the authors have observed a peak value of refractive index when photon energy equals the energy of bandgap width, calculated the optical band gap of the prepared ZnO solid thin film and proved the defect energy level, which is caused by the presence of oxygen vacancy and interstitial zinc atom in the ZnO solid thin film.

关 键 词：ZNO薄膜 溶胶-凝胶 椭圆偏振光谱 

分 类 号：TN213[电子电信—物理电子学]