用于超高密度存储的硅基纳机电探针阵列器件研制  

Fabrication of Nanomechanical Electro-thermal Probe Array for Ultrahigh Density Storage

作　　者：杨尊先[1] 于映[1] 李昕欣[2] 

机构地区：[1]福州大学电子科学与应用物理系,福州350002 [2]中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室,上海200050

出　　处：《真空科学与技术学报》2005年第6期422-426,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(No.60376038);福建省自然科学基金项目(No.A0510011);福州大学科技发展基金(2005-XQ-26)

摘　　要：本文研制一种用于超高密度数据存储的硅基纳机电探针阵列器件.简要介绍了器件结构及其工作原理,并通过理论计算和有限元模拟相结合的方法实现器件的结构设计.并运用先进的微纳加工工艺技术制造出相应的器件,具体包括:先进的纳米硅尖制造技术、高电隔离性的加热电阻制作技术及其纳机电探针上加热电阻与压阻传感器集成技术等.室温下,测得该器件加热电阻器的阻值为(500～600) Ω,压阻传感器的阻值为(6～8) KΩ,在2×10-7 N预力作用于针尖处时,悬臂梁上的压阻器件灵敏度(电阻相对变化)达到了3.12×10-4,满足纳米数据坑读出对于灵敏度要求;纳米针尖曲率半径小于40 nm,满足器件高密度存储对于硅尖要求.建立一套适用于该纳机电探针的电热理论模型,利用该模型计算的结果与器件电热测试结果相吻合.A novel type of silicon-based,mechanical, electro-thermal probe array has been successfully developed for high density data storage. In addition to theoretical analysis and finite dement simulation, a combination of cross-disciplined technologies have been used in its design and fabrication, including fabrication of silicon nano-tip and high-electrical-insulation resistive heater, as well as the integration of heater and piezo-resistor on nanometer-scale electro-mechanical-system （NEMS） probe and （micro-） nano-machining. We found that the piezo-resisfive sensitivity of the cantilever and the tip, with its apex diameter less than 40 nanometer, work well in high density storage.An electro-thermal model was developed and the simulation agrees fairly well with experiments.

关 键 词：纳米硅尖制造技术 电阻加热器 压阻灵敏 度高密度存储技术 

分 类 号：TN201[电子电信—物理电子学] TP333.4[自动化与计算机技术—计算机系统结构]