双压电片振子精密载物工作台研究  

Experimenting Study on Pricise Platform Using Bimorph

作　　者：程光明[1] 华顺明[1] 杨志刚[1] 曾平[1] 冯强[1] 

机构地区：[1]吉林大学机械科学与工程学院,吉林长春130025

出　　处：《压电与声光》2006年第1期36-38,42,共4页Piezoelectrics & Acoustooptics

基　　金：国家"八六三"计划基金资助项目(2002AA423150)

摘　　要：利用两端固支的双压电晶片在电场作用下可弯曲变形,且有中心区域变形量大的特点,并研制了一种简单的基于粘-滑(stick-slip)原理的步进式载物工作台实验装置。该装置结构简单,可在工作平面实现二维移动。进一步分析了该装置的结构特点和作用机理,并进行了初步实验研究。通过实验测试表明,此装置具有较好的承载能力和运动稳定性,可望在位移分辨率为微米、亚微米级但方向性要求不高的场合作为载物台使用,如在显微镜下观测样本、运送微小零部件至装配线等。As well known, the bimorph which be fixed two tips can be bend under electric field, while the max displacement lies on center. According to above phenomenia, this paper introduces an invention of translation mechanism based on stick-slip principle. The device is simple, which can realize two-dimentional movement on woke plane. The structure characteristic and function mechanism of the device carried on the preliminary reaearch experiment are analysed farther. Tested through experiments, this mechanism has been found to have good carrying ability and moving stability. Therefore,it can be used as carrying stage to meet micro-displacement needs, when the resolution is at micron or sub-micron level and low requirement of keeping the direction,such as carrying sample under microscope,transmitting tiny parts to assembly line etc.

关 键 词：压电晶片 锯齿波 粘-滑原理 精密载物工作台 

分 类 号：TB522[理学—物理]