测量压电式微压传感器灵敏度的新方法  

Novel method used to measure sensitivity of piezoelectric micropressure sensor

作　　者：王丽坤[1] 朱同淑[2] 李书相[1] 李光[1] 张福学[1] 

机构地区：[1]北京信息工程学院传感技术研究中心,北京100101 [2]北京邮电大学,北京100876

出　　处：《传感器与微系统》2006年第2期76-77,共2页Transducer and Microsystem Technologies

基　　金：北京市自然科学基金资助项目(KZ200410772016);北京市传感器重点实验室资助项目(200407022)

摘　　要：研制了一套压电微压传感器的性能测量系统，它采用均匀声腔硅油介质中传播的声波作为压力源，标准传感器和被测传感器同时接收波动声压，比较两传感器的输出，测定被测传感器的灵敏度及频响。实验测试了3只压电式微压传感器，结果表明：传感器的灵敏度平均为3．0mV／Pa，工作频率为20～2000Hz，灵敏度随频率波动小于0．5mV／Pa，灵敏度重复偏差小于0．24mV／Pa。A novel system used to measure the sensitivity and operating frequency of piezoelectric mieropressure sensor is developed. The pressure of the acoustic wave propagated in silicon oil is used as input signal in the system. The standard and tested sensors receive the signal at the same time. Comparing the output of the two sensors,the sensitivity and frequency response of tested sensor can be determined. Three sensors are measured in the experiment,the results show that the average sensitivity of micropressure sensor is 3.0 mV/Pa,the operating frequency is 20 - 2000 Hz,the sensitivity fluctuation with frequency is less than 0.5 mV/Pa,the repeated error of the sensitivity is less than 0.24 mV/Pa.

关 键 词：压电 微压传感器 灵敏度 测试系统 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]