目标激光散射特性在钢板表面微观轮廓精度测量中的应用  

Applying Laser Scattering Characteristic of Object to Measuring Surface Microcosmic Profile Precision of Steel Plate

作　　者：李丽娟[1] 安志勇[1] 曹国华[1] 董起顺[1] 李振辉[1] 曹维国[1] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《兵工学报》2006年第1期106-110,共5页Acta Armamentarii

摘　　要：针对冷轧钢板表面微观轮廓精度的在线测量问题,提出了测量钢板表面粗糙度的2个重要参数轮廓算术平均偏差Ra和每英寸峰值个数PPI的原理和方法。以Beckmann光散射理论为基础,分析和建立了冷轧钢板表面粗糙度参数数学模型,从而确立了镜面反射光强和表面粗糙度之间的定量关系。通过理论分析和实验的方法找到最佳的入射激光波长,设计了表面粗糙度参数Ra测量分系统和每英寸波峰数PPI测量分系统。采用集成技术,将Ra测量单元、PPI测量单元等多个不同功能的单元集成在一起,实现多个参数的同时实时非接触测量。Taking aim at measuring the precision of surface microcosmic profile of the cold-rolled steel plate, the principle and technique of measuring surface roughness parameters about the profile arithmetic average error Ra and the peaks per inch（PPI） were proposed. The models of profile arithmetic average error Ra and correlation length T of the cold-rolled steel plate surface were established based on the Beckmann light scattering theory and the quantitative relation between specular reflection and surface roughness was founded. Through the theoretical and test result analysis, the optimal laser incidence wavelength was found, and the measuring subsystems of R, and PPI were designed. By using an integration technique, the Ra unit, PPI unit and other various units can be integrated. So the realtime and simultaneous non-contact measurement of multi-parameters can be realized.

关 键 词：光学 激光 散射 镜向反射 非接触 

分 类 号：TG84[金属学及工艺—公差测量技术]