溶胶凝胶旋转涂敷技术制备ZnO∶In薄膜的结构特性  

Structural properties of ZnO∶In thin films prepared by sol-gel spin-coating technique

作　　者：兰伟[1] 刘雪芹[1] 黄春明[1] 唐国梅[2] 杨扬[1] 王印月[1] 

机构地区：[1]兰州大学物理系,兰州730000 [2]西北民族大学计算机科学与信息工程学院,兰州730030

出　　处：《物理学报》2006年第2期748-752,共5页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:50272027)资助的课题.~~

摘　　要：采用溶胶凝胶法,结合旋转涂敷技术在石英衬底上制备了210—240nm厚度的ZnO∶In薄膜.使用掠角入射X射线衍射(GI_XRD)、常规X射线衍射、傅里叶变换红外光谱、原子力显微镜、光致发光谱以及不同入射角GI_XRD谱(α=1,2,3和5°)等手段,对不同掺杂浓度的ZnO∶In薄膜进行了结构分析.发现ZnO∶In薄膜内部是由大尺寸(002)晶向的无应力ZnO晶粒堆积而成,而薄膜表面主要是小尺寸的(002)和(103)晶粒,并且适量的In掺杂能有效改善ZnO薄膜内部的晶体结构特性.ZnO： In thin films with thickness varying in the 210--240nm range were prepared on quartz substrates by sol-gel spincoating technique. The structural properties of these thin films （In/Zn = 0, 1, 2, 3 and 5at%） were studied by grazing incidence X-ray diffraction, conventional X-ray diffraction, Fourier transform infrared spectroscopy, atomic force microscopy and photoluminescence. It is found that the ZnO ： In thin films are composed of the unstressed bulk layer packed up by large grains with （002） plane and the surface layer by small grains with （002） and （103） planes, and a proper In doping concentration can improve structural properties of ZnO thin films. The analytic results were further proved by grazing incidence X-ray diffraction at different incidence angles （α = 1, 2, 3 and 5°）.

关 键 词：ZnO:In薄膜 晶体结构 掠角入射X射线衍射 溶胶凝胶法 

分 类 号：TB383.1[一般工业技术—材料科学与工程]