基于数字微镜的高质量精缩投影光刻系统的研制  

Research on High Quality Reduction Projecting System Based on Digital Micromirror Device

作　　者：陈劲松[1] 

机构地区：[1]安徽财经大学信息工程学院,安徽蚌埠230041

出　　处：《激光与红外》2006年第3期206-209,共4页Laser & Infrared

摘　　要：文章详细介绍了数字微镜系统总体设计,并进行了实验验证。数字微镜如果结合高质量的高倍精缩投影光学系统,完全可实现亚微米级衍射微光学元件的制作。最后对系统特点和系统误差进行了总结。The overall design of Digital micromirror device （DMD）. system is given detailedly, and experimental verifying is also carried out. If it is combined with high quality reduction projecting system, the fabrication of sub-micron diffractive optical elements can be realized completely. In the end, system characteristic and system error are summarized.

关 键 词：数字微镜 灰度掩模 系统设计 系统特点 系统误差 

分 类 号：TN205[电子电信—物理电子学] TN430.5