硅吸除技术  

Silicon Gettering Technique

作　　者：蒋荣华 梁李成 肖顺珍 

机构地区：[1]峨眉半导体材料厂,所,四川峨眉614200

出　　处：《半导体光电》1990年第3期289-296,共8页Semiconductor Optoelectronics

摘　　要：本文详细地叙了各种硅吸除技术;阐明了非本征吸除、本征吸除和综合吸除的机理和工艺。举例说明了吸除技术的应用。Various kinds of silcon gettering techiques as well as the mechanism and technology are described in detail such as extrinsic,intrinsic and synthetic getter- ings.Examples are given.demonstrating the applications of the above gettering tech- niques.

关 键 词：硅 吸除技术 单晶材料 工艺 

分 类 号：TN304.12[电子电信—物理电子学]