波像差法构建非球面干涉检测的误差分离模型  

Error-separation model for interferometric testing aspheric surfaces based on wavefront aberrations

作　　者：程灏波[1] 冯之敬[1] 

机构地区：[1]清华大学精密仪器与机械学系

出　　处：《清华大学学报（自然科学版）》2006年第2期187-190,共4页Journal of Tsinghua University(Science and Technology)

基　　金：国家自然科学基金资助项目(50175062);国家博士后基金资助项目(2003034142)

摘　　要：非球面元件光学干涉检测中,获得客观、准确的面形信息是实现元件快速、确定性制造的关键因素之一。为了实现大口径光学离轴非球面反射镜的高精度检测,对其干涉检测结果中的误差信息表现形式进行了分析研究,提出了一种基于将离轴非球面反射镜检测工装视为具有5维自由度空间刚体设想的误差分离矩阵,并从波像差理论出发,寻求出调整误差作用分量的分立表现形式及影响参数,建立了计算机辅助检测大口径光学离轴非球面反射镜的基本模型。仿真分析结果证实了这种方法的可行性。During interferometric testing, an objective, accurate evaluation of the surface information is one of the key factors needed to realize fast, deterministic manufacturing of large off axis aspheric mirrors. An error-separation matrix for analysis of the error information in the testing results was developed by modeling the aspheric surface as a rigid body with five degrees of freedom. Wavefront aberration theory was used to find expressions for the adjustment errors and parameters for computerized testing of large aperture off-axis aspheric mirrors. Simulations correctly predicted interferometric patterns corresponding to different adjustment errors so the simulations can be used to quickly adjust the test system.

关 键 词：干涉检测 非球面 波像差 刚体 

分 类 号：TH744.3[机械工程—光学工程]