粉末溅射平面薄膜型SnO_2／CeO_2酒敏传感器  

Powder Sputtering Plane Thin-Film SnO_2/CeO_2 Alcohol Sensor

作　　者：李建明[1] 刘文利[1] 裘南畹[1] 吕红浪[1] 

机构地区：[1]山东工业大学数理系,济南大学机电系

出　　处：《电子学报》1996年第5期114-116,共3页Acta Electronica Sinica

摘　　要：介绍粉末溅射研制的ＳｎＯ２／ＣｅＯ２酒敏薄膜的性能与膜厚、温度和掺杂量等关系的研究结果，并根据此结果对平面薄膜型酒敏传感器的工艺和结构进行的设计；介绍所研制器件的一些性能，并对有关问题进行讨论。SnO2/CeO2 gas sensing thin films for alcohol were deposited by powder sputtering,whose properties releting to film thickness,temperature and dose are given. For these results above,the technology and structure of plane thin film gas sensors for alcohol were designed. Some properties of these sensors are introduced and the releted problems are discussed.

关 键 词：粉末溅射 薄膜 传感器 酒敏 二氧化锡 二氧化铈 

分 类 号：TN304.21[电子电信—物理电子学] TN305.92